Biaxial inclination sensor KAS804-41 / KAS804-42

The sensors are based on a further development of ‘bulk micro-machined” technology. The three dimensional structure of the sensor incorporates a pendulum made of single crystal silicon which is hermetically sealed between two silicon plates. The result is that the sensor has long term stability, a high resolution and is shock resistant. The measuring element is gas damped which avoids overshooting, disrupting resonance frequency effects and filters vibrations. A number of possible disruptions can be eliminated by measuring the difference between two separate outputs, X & Y. The resolution and precision can therefore be doubled.

2-achsiger Neigungssensor KAS804-41 / -42
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