Biaxial inclination sensor KAS804-51 / KAS804-52

The sensors are based on a further development of ‘bulk micro-machined” technology. The three dimensional micro mechanical structure of the sensor incorporates a pendulum made of single crystal silicon which is hermetically sealed between two silicon plates. The result is that the sensor has long term stability, a high resolution and is shock resistant. The measuring element is gas damped which avoids overshooting and disrupting resonance frequency effects. The pendulum’s capacity is measured with an ASIC.